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    GAU05 Series


    ★ Light-weight and Extra-thin-It creates the wing-free thin & lighter mechanism by applying the XYθ module.
    ★ The cross-roller bearings have been pre-loaded, to perform the whole unit high precision and rigidity.
    ★ Hollow structure-It can be used for the optical inspection devices or conduction tester.
    ★ Longer usage life and reliable accuracy of the Alignment stage itself is guaranteed by lubrication.
    ★ All products are Cryogenic Treatment. It can not only significantly upgrade the toughness and operation lifetime but also improve the dimension stability of materials.
    ★ 3D CMM- Ensure the quality and precision of the stage.
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    Model no

    Travel stroke (mm)

    Loading (kgf)

    GAU05-RSD

    ±5x±5

    117

    GAU05-RSS

    ±5x±5

    117

    GAU05-CCD

    ±5x±5

    64

    GAU05-CCS

    ±5x±5

    64